Heterojunction field effect transistor

摘要

A heterojunction field effect transistor includes a first contact portion and a second contact portion. A length of the first contact portion in a longitudinal direction is smaller than a length of source electrodes in the longitudinal direction, and a length of the second contact portion in the longitudinal direction is smaller than a length of drain electrodes in the longitudinal direction. For each drain electrode, a distance from ends of the second contact portion to ends of the drain electrode, the ends being outside of the second contact portion, is greater than a distance from ends of the first contact portion to ends of the source electrode, the ends being outside of the first contact portion.

主权项

1. A heterojunction field effect transistor comprising:
a GaN-based multilayer body having a heterojunction; a plurality of finger-shaped drain electrodes formed parallel to each other on the GaN-based multilayer body; a plurality of finger-shaped source electrodes formed parallel to each other on the GaN-based multilayer body such that the source electrodes and the drain electrodes are alternately arranged in an arrangement direction of the drain electrodes; gate electrodes formed in regions between the drain electrodes and the source electrodes in plan view; an interlayer insulating film formed on the GaN-based multilayer body so as to cover the source electrodes, the drain electrodes, and the gate electrodes; first contact portions formed in the interlayer insulating film in regions above at least portions of the respective source electrodes, the first contact portions extending in a longitudinal direction of the source electrodes; and second contact portions formed in the interlayer insulating film in regions above at least portions of the respective drain electrodes, the second contact portions extending in a longitudinal direction of the drain electrodes, wherein a length of the first contact portions in the longitudinal direction is smaller than a length of the source electrodes in the longitudinal direction, wherein a length of the second contact portions in the longitudinal direction is smaller than a length of the drain electrodes in the longitudinal direction, and wherein, in each drain electrode, a distance X from ends of the second contact portion to ends of the drain electrode, the ends being outside the second contact portion, is greater than a distance Y from ends of the first contact portion to ends of the source electrode, the ends being outside the first contact portion, wherein the length of the second contact portions in the longitudinal direction is smaller than the length of the first contact portions in the longitudinal direction, wherein the second contact portions are disposed within an interval defined by the ends of the first contact portions in the longitudinal direction of the first contact portions, wherein a length of the source electrodes in the longitudinal direction is smaller than a length of the drain electrodes in the longitudinal direction, and wherein the source electrodes are disposed within an interval defined by the ends of the drain electrodes in the longitudinal direction of the drain electrodes.