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发明名称
KORPUSKULARSTRAHLOPTISCHES GERAET ZUR VERKLEINERNDEN ABBILDUNG EINER MASKE AUF EIN ZU BESTRAHLENDES PRAEPARAT
摘要
申请公布号
DE2702445(A1)
申请公布日期
1978.07.27
申请号
DE19772702445
申请日期
1977.01.20
申请人
SIEMENS AG
发明人
ANGER,KLAUS,DIPL.-ING.;LISCHKE,BURKHARD,DR.-ING.;MUELLER,KARL-HEINZ,DR.RER.NAT.;OELMANN,ANDREAS,DR.-ING.
分类号
H01L21/027;H01J37/30;(IPC1-7):H01J37/30;H01J37/28;H01L21/82
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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