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经营范围
发明名称
HEAT TREATMENT APPARATUS
摘要
申请公布号
JPS53124967(A)
申请公布日期
1978.10.31
申请号
JP19770039501
申请日期
1977.04.08
申请人
HITACHI LTD
发明人
AOSHIMA TAKAAKI
分类号
H01L21/22;H01L21/324
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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