SUBSTRATE BREAKING DEVICE AND METHOD

摘要

PROBLEM TO BE SOLVED: To provide a substrate breaking device which can effectively break a substrate by heating or cooling in a scribe line direction the substrate formed with a scribe line, and can effectively break the substrate by accurately controlling heating or cooling of the substrate.SOLUTION: A substrate breaking device comprises: a first heat transmitting element for heating or cooling a first region of a substrate formed with a scribe line; and a second heat transmitting element arranged so as to be adjacent to the first heat transmitting element in the scribe line direction for cooling or heating a second region of the substrate reversely to the first region.SELECTED DRAWING: Figure 1