发明名称 PRODUCTION OF SOLAR BATTERY USING COMPOUND SEMICONDUCTOR CRYSTAL
摘要 PURPOSE:To obtain a solar battery using a high-reproducibility compound semiconductor by preventing an oxide film from being formed on the surface of a GaAlAs layer in production. CONSTITUTION:N-type GaAs layer 22, p-type GaAlAs layer 23 and pn junction 24 are formed on n-type GaAs crystal substrate 21, and p-type GaAs layer 27 is grown. After that, Zn is diffused to form p<+>-type diffusion layer 25, and ohmic electrodes 25a and 21a are formed. Next, electrode 25a in the p<+>-type diffusion layer side is used as a mask to remove p-type GaAs layer 27, and a reflection prevention film is formed on the surface of p-type GaAlAs layer 24.
申请公布号 JPS54134586(A) 申请公布日期 1979.10.19
申请号 JP19780041742 申请日期 1978.04.11
申请人 KOGYO GIJUTSUIN 发明人 HATAYAMA TAMOTSU;HOUJIYOU AKIMICHI
分类号 H01L31/04;H01L21/208 主分类号 H01L31/04
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