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发明名称
MECHANISM FOR ELEVATIONALLY MOVING CAPILLARY
摘要
申请公布号
JPS54154273(A)
申请公布日期
1979.12.05
申请号
JP19780062266
申请日期
1978.05.26
申请人
SHINKAWA SEISAKUSHO KK
发明人
YAMAZAKI NOBUHITO;SUGIURA KAZUO
分类号
H01L21/60
主分类号
H01L21/60
代理机构
代理人
主权项
地址
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