UHF energised plasma source - has resonant annular cavity within glass envelope for e.g. laser modulation plasma spectroscopy and pollution detection

摘要

The plams source energised by a UHF source is applicable to UHF detection systems, laser modulation plama spectroscopy, pollution detection etc. The sources consists of a dielectric walled cell set across a waveguide. The cell wall (18), possibly glass, necks as it passes through the waveguide walls on either side, the necks providing input and output ports. The cell centre section houses an annular metal chamber (19). Entry to the chamber via holes (21a) in one end wall (21). Exit is via an annular channel in the opposite end wall (19a, 20a). The metal cavity has a self inductance and capacitance with a natural resonant frequency and a loss component (R).