| 摘要 |
PURPOSE:To stabilize characteristics of a vibrator by forming a silicon film and metal film on the surface of a diaphragm and then by diffusing the metal of the metal film in the silicon film. CONSTITUTION:On both top and reverse surfaces of crystal plate 1, silicon film 2 is formed opposing mutually and on the top surface of it, metal film 3 for an electrode is formed of gold or silver. Then, etching work is carried out in a fixed shape such as a trning-fork type by using silicon film 2 and metal film 3 as masks. In those processes, a heat treatment is done in a hot furnace of a temperature lower than the curie point of crystal, e.g. 400-500 deg.C to mix and diffuse part of metal in metal film 3 into silicon film 2, thereby making silicon film 2 conductive. As a result of making this film conductive through this diffusion, the parallel capacity of a vibrator is never varied by silicon film 2 and characteristics of the vibrator is never varied by silicon film 2 and characteristics of the vibrator can therefore be stabilized. |
