发明名称 POSITION DETECTING SYSTEM
摘要 <p>PURPOSE:To obtain an exact position of the electrode regardless of an affection due to the inside expansion of an electrode figure by using the magnitude of projection in one direction in the arithmetic circuit and by calculating the center position of the figure from the circumference of the projection in the other direction. CONSTITUTION:An image of the pellet 2, which is obtained by photoelectric scanner 6 is binary-coded by the binary-coding circuit 8, the binary-coded figure is made a dotted figure by the circular mask matching circuit 9, and a large dotted figure is cut by the greater noise removing and coordinates extracting circuit 10. And the leftmost (c), rightmost (d), uppermost (a) and lowermost (b) coordinate values of each of the central groups G1, G2 of the remained circular mask are obtained. At this time, when PEO is made the origin, the Y-coordinate of the real center position of the electrode is equal to a half of the expansion PEY in the Y-direction, and the real center position can be obtained by making the X-coordinate the distance LETC that is equal to a half of the expansion in the Y-direction PEY.</p>
申请公布号 JPS55131707(A) 申请公布日期 1980.10.13
申请号 JP19790039173 申请日期 1979.03.30
申请人 NIPPON ELECTRIC CO 发明人 YAMAZAKI KEIJI
分类号 G01B11/00;G01B21/00;G05D3/12;H01L21/60 主分类号 G01B11/00
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