发明名称 Method of producing a semiconductor photodiode of indium antimonide and device thereof
摘要 A method of producing semiconductor photodiodes of indium antimonide, by growing an indium antimonide epitaxial layer of one type conductivity onto a substrate of indium antimonide of another type conductivity, utilizing conventional vapor phase or liquid phase epitaxial techniques, wherein the antimony in the epitaxial layer is partially replaced by either arsenic or phosphorus, thus resulting in a high performing photoelectric device.
申请公布号 US4237471(A) 申请公布日期 1980.12.02
申请号 US19790051245 申请日期 1979.06.22
申请人 HAMAMATSU CORPORATION 发明人 POMMERRENIG, DIETER H.
分类号 H01L31/103;H01L31/18;(IPC1-7):H01L27/14 主分类号 H01L31/103
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