POLYMER POSITIVE IMAGE FORMING METHOD

摘要

PURPOSE:To form a polymer positive image with high sensitivity and high resolving power by utilizing the decomposability of a high molecular compound having sulfide bonds and using the compound as a photoresist. CONSTITUTION:A high molecular compound having one or more sulfide bonds in each molecule and a mol. wt. of about 1,000 or more is used. The compound includes a ring opened polymer of a cyclic sulfide compound such as ethylene sulfide or cyclohexene sulfide and a high mol. wt. condensate of alkyl dihalide and sodium sulfide. A soln. of the high molecular compound in an org. solvent is coated onto a substrate such as a glass plate or a silicon plate and dried to form a polymer film. The film is then imagewise exposed by irradiating light or radiation, and the irradiated portion of the film is dissolution-removed by solvent treatment to obtain the desired positive image.