NITRIDE THERMOELECTRIC CONVERSION MATERIAL, MANUFACTURING METHOD THEREFOR AND THERMOELECTRIC CONVERSION ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide: a nitride thermoelectric conversion material which does not use harmful elements, exhibits good performance, and can form a thin layer such as a film; a manufacturing method therefor; and a thermoelectric conversion element.SOLUTION: The nitride thermoelectric conversion material comprises a metal nitride represented by general formula WN(0.18≤y≤0.33), and has a β-WN type crystal structure and n-type thermoelectric properties. The method for manufacturing this nitride thermoelectric conversion material has a film forming step for forming a film by reactive sputtering in a nitrogen-containing atmosphere using a W sputtering target.SELECTED DRAWING: Figure 1