| 摘要 |
PROBLEM TO BE SOLVED: To provide an ultraminiaturized laminated actuator, and to provide a method for manufacturing a ultraminiaturized piezoelectric element which constitutes the laminated actuator. SOLUTION: A plurality of piezoelectric unimorphs 1A-1E are laminated with the positions of connection wirings 51 and 52 aligned, to constitute a laminated actuator. At an elastic plate 2 of each of the piezoelectric unimorphs. 1A-1E, a central contact part 23 and a ring-like peripheral contact part 22 are formed so as to contact the adjoining piezoelectric unimorphs 1A-1E, thus a force equivalent to the number of sheets of layers is exhibited. To a disk part 21 of the elastic plate 2, a piezoelectric plate 4 is jointed while being held between both electrodes 31 and 32. Such piezoelectric unimorphs 1A-1E such as these are manufactured in multiple numbers, in parallel, of a silicon wafer by utilizing a fine working technology for a semiconductor element, so that ultraminiaturized piezoelectric unimorphs 1A-1E are mass-produced at a low cost. As a result, a laminated actuator becomes ultrasmiturized and presented at low cost. |
