Liquid crystal display cell transparent electrode mfr. - includes heat treatment in nitrogen atmos. to increase laser absorption

摘要

The electrode is formed by applying a transparent conductive layer via cathode sputtering on a transparent substrate, before subjecting it to heat treatment in a nitrogen atmos. Pref. the cathode sputtering is carried out in a reduced argon atmos. with the electrode layer comprising equal parts of indiun and tin. The heat treatment is carried out at a temp of 400 deg.C which is attained over a period of about 30 minutes, with the subsequent cooling down taking between 1 and 3 hours. The characteristics of the electrode can be varied by controlling the heating and cooling down phases of the heat treatment process. The latter allows a refractive index of 2.3 to be obtained for the electrode, so that it absorbs about 50 per cent of the energy of a YAG laser used to inscribe the display information.