| 摘要 |
PROBLEM TO BE SOLVED: To reduce the influence of an additive and the thickness of an irradiated body so as to form a fine pattern by irradiating electron beams with the specific value of accelerating voltage to a member to be hardened, cross-linked or reformed, through a mask. SOLUTION: Electron beams with accelerating voltage of 10-150 kV are irradiated to a member to be hardened, cross-linked or reformed, through a mask with a specified pattern to form a pattern. A vacuum pipe type electron beam irradiation device is used as an electron beam generating device that can realize such low accelerating voltage. In this device, an electron beam generating part 2 in a vacuum container 1 made of cylindrical glass or ceramic takes out electrons emitted from a negative electrode as electron beams and accelerates them, and electron beams emitted from an irradiation aperture 5 are irradiated to irradiated material. The electron beams are therefore allowed to act upon coating material on a base material, with low depth so as to reduce an adverse effect on the base material and the generating quantity of secondary electron beams. |
