| 摘要 |
PROBLEM TO BE SOLVED: To improve soaking properties at a sample holding surface.SOLUTION: A sample holding tool 10 includes: a ceramic body 1 having a sample holding surface 11 on an external surface; and an electrode 2 for electrostatic attraction, provided so as to face the sample holding surface 11 inside the ceramic body 1. The electrode 2 is thinner at a peripheral part 4 compared with a center part 3.SELECTED DRAWING: Figure 1 |
