Humidity sensor and method of producing it

摘要

The humidity sensor specified has an extended impedance range of up to 10<12> OMEGA and a low sensitivity to interfering signals. This sensor comprises inner and outer conducting films (11, 12) on a high-purity insulating substrate (10), there being an annular gap (13) between the films. A high-impedance humidity-sensitive film (30) covers the annular gap (13) and extends over the inner and outer films. <IMAGE>