发明名称 UNA PELICULA DELGADA MEJORADA,PARTICULARMENTE UTIL EN LA FORMACION DE CAPAS DE PELICULA AISLANTES O SEMICONDUCTORAS Y EL METODO PARA SU OBTENCION
摘要 <p>A thin film and method of making the same involving a film (11) in which pinholes (17, 18, 19) in the film are plugged with insoluble photoresist material (21). The film (11) is substantially opaque to the light wavelength range causing said photoresist material to become insoluble. The method for making such thin film involves coating said thin film (11) on one side with a layer of insulating photoresist material so that a substantial portion of substantially all of the pinholes (17, 18, 19) are filled and then exposing the other side of the film to the light wavelength range causing said photoresist material to become insoluble.</p>
申请公布号 AR226245(A1) 申请公布日期 1982.06.15
申请号 AR19820228741 申请日期 1982.03.15
申请人 MONOSOLAR INC 发明人
分类号 H01L31/04;G03F7/26;H01L31/18;(IPC1-7):01L21/108;01L21/205 主分类号 H01L31/04
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