| 摘要 |
PURPOSE:To obtain sufficient resistivity to humidity and corrosion by covering a highly magnetic thin film conductor formed on a substrate with multi-layered construction of an inorganic film and an organic film. CONSTITUTION:A highly magnetic thin film 2 is formed on a substrate 1 and covered, except for a junction pad, with a laminated layer 7 of an inorganic film 3 and an organic film 4. The film 3 is made of SiO2, Al2O3 and the like by sputtering and the film 4 is made by coating resin varnish of polyester group or polyimide group. The fluidity of the organic film 4 coveres possible pin holes produced in the inorganic film 3, effectively protecting the high magnetic element film 2 and making it unnecessary to contain the element in a plastic mold or ceramic container. |
