| 摘要 |
PURPOSE:To make it possible to measure temperature of a moisture sensing element at the same time when measuring the humidity, by embedding in the moisture element a platinum electrode as a temperature detecting element. CONSTITUTION:After platinum paste was printed or coated in a prescribed pattern (such as, in a comb shape) on a heat-resisting alumina sintering plate, it is baked at a prescribed temperature to form a platinum electrode. And then, after a thick-film paste, which is to be prepared by kneading a mixture of binder and pulverized material of a moisture sensing element assembly, was coated on the surface of a substrate in such a manner as to embed the platinum electrode by using such processes as screen printing process and coating process, etc., it is backed at a prescribed temperature. This moisture sensing element assembly is turned into a moisture sensing element by forming an electrode on the surface by baking gold paste or platinum paste thereon. In thus manufactured moisture sensing element, temperature of the moisture sensing element assembly is detected by measuring electrical resistance of the platinum electrode formed immediately above the substrate, and at the same time, the humidity at this temperature is also detected by electrical resistance between the electrodes provided on this electrode and the moisture sensing element assembly. |
