| 摘要 |
PURPOSE:To assure the quality of products and the safety operation, by comparing a process state signal with a signal stored in a process state monitor table, processing the process control when the result is normal, and referencing a mask data storage table if failure. CONSTITUTION:An override set state storage table is added to conventional devices. A process state signal is stored in a process state monitor table 2 and a program state monitor program 4 compares this signal with a state signal of a prescribed process stored in a monitor state storage table 6 in advance. When the result is normal, the process control proceedes. If discriminated as failure, the question whether the state signal inputted from the process is neglected or not is referenced to the table 6 stored in advance. In case of mask-on, the input data is neglected to proceed the control and in case of mask-off, the state of the process is regarded as failure. |
