PROCEDE DE FABRICATION D'UNE DIODE SCHOTTKY SUR UN SUBSTRAT EN DIAMANT

摘要

A method for producing a Schottky diode, including the following steps: oxygenating the surface of a semiconductive layer of monocrystalline diamond, in such a way as to replace hydrogen surface terminations of the semiconductive layer with oxygen surface terminations; and forming, by physical vapour deposition, a first conductive layer of zirconium or indium-tin oxide on the surface of the semiconductive layer.