发明名称 TEG CHIP, WAFER AND QUALITY CONTROL METHOD
摘要 PROBLEM TO BE SOLVED: To provide a TEG chip which allows for measurement of the characteristics while separating a triac to the single level transistor of the smallest unit, while determining the acceptability.SOLUTION: A TEG chip (10) is a triac having an N type substrate (310), P type diffusion layers (320, 33), N type diffusion layers (34, 35, 36), a first electrode (T1), a second electrode (T2), and a gate electrode (G), and has a test electrode (7) for detecting the potential of the N type substrate (310).SELECTED DRAWING: Figure 4
申请公布号 JP2016184669(A) 申请公布日期 2016.10.20
申请号 JP20150064185 申请日期 2015.03.26
申请人 SHARP CORP 发明人 MARIYAMA MITSURU;OKAMOTO TOMOAKI
分类号 H01L21/66 主分类号 H01L21/66
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