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1. An integrated type gas supplying apparatus, comprising:
a plurality of stacked and fixed gas supplying units, each gas supplying unit having at least four gas supply lines, each gas supplying unit formed by opposingly combining and fixing two flow controllers, each flow controller provided with a plurality of flow control units, to a gas inlet-side block and a gas outlet-side block, wherein the gas inlet-side block and the gas outlet-side block are disposed in parallel across an interval in plan view, wherein each flow controller is provided with a first inlet opening and closing valve and first outlet opening and closing valve, wherein an inlet opening and closing valve main body block is fixed to a right side surface of the gas inlet-side block, the inlet opening and closing valves of the respective flow controllers are fixed to a front surface side and a back surface side of the inlet opening and closing valve main body block, an outlet opening and closing valve main body block is fixed to a left side surface of the gas outlet-side block, and the outlet opening and closing valves of the respective flow controllers are fixed to a front surface side and a back surface side of the outlet opening and closing valve main body block. |
