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经营范围
发明名称
DRY ETCHING METHOD
摘要
申请公布号
JPS58150429(A)
申请公布日期
1983.09.07
申请号
JP19820032376
申请日期
1982.03.03
申请人
HITACHI SEISAKUSHO KK
发明人
AKIYAMA NOBORU;OKANO SADAO
分类号
B01J19/08;H01L21/02;H01L21/302;H01L21/3065
主分类号
B01J19/08
代理机构
代理人
主权项
地址
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