发明名称 Wafering system
摘要 The wafering system employs a chuck assembly for moving a severed wafer from a crystal through the aperture in the cutting blade to a take-off conveyor. The chuck assembly includes a suction head which is pivotally mounted via a pivot arm assembly, a slide for moving the head back and forth and a carriage for vertically moving the head up and down. A motor is used to actuate the carriage while air cylinders are used to actuate the slide and pivot arm assembly.
申请公布号 US4420909(A) 申请公布日期 1983.12.20
申请号 US19810320097 申请日期 1981.11.10
申请人 SILICON TECHNOLOGY CORPORATION 发明人 STEERE, JR., ROBERT E.
分类号 B28D1/22;B23Q7/04;B28D5/00;B28D5/02;H01L21/304;H01L21/683;(IPC1-7):B24B7/20 主分类号 B28D1/22
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