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发明名称
PHOTORESIST PRETREATMENT
摘要
申请公布号
GB8330673(D0)
申请公布日期
1983.12.29
申请号
GB19830030673
申请日期
1983.11.17
申请人
VARIAN ASSOCIATES INC
发明人
分类号
H01L21/027;H01L21/033;H01L21/265;H01L21/266;H01L21/302;(IPC1-7):C23C13/06
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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