发明名称 ELECTRONIC DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOBILE BODY
摘要 PROBLEM TO BE SOLVED: To provide an electronic device with an excellent reliability, and a pressure sensor, an altimeter, an electronic apparatus, and a mobile body which have the electronic device.SOLUTION: An electronic device 1 of the present application includes: a substrate 2; a piezoresistive element 5 on the substrate 2; a wall part near one surface of the substrate 2 surrounding the piezoresistive element 5 in a planar view of the substrate 2; and a ceiling part opposite to the substrate 2 with respect to the wall part, forming a hollow part S with the substrate 2 and the wall part. An inner peripheral edge 643 at an edge of the wall part near the ceiling part has a convex corner 6432 projecting to become further from the center of the hollow part S in a planer view.SELECTED DRAWING: Figure 2
申请公布号 JP2016200534(A) 申请公布日期 2016.12.01
申请号 JP20150081752 申请日期 2015.04.13
申请人 SEIKO EPSON CORP 发明人 MATSUZAWA YUSUKE;FUJII MASAHIRO
分类号 G01L9/00;B81B3/00;B81B7/02;H01L29/84;H03H9/24 主分类号 G01L9/00
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