发明名称 |
ELECTRONIC DEVICE, PRESSURE SENSOR, ALTIMETER, ELECTRONIC APPARATUS, AND MOBILE BODY |
摘要 |
PROBLEM TO BE SOLVED: To provide an electronic device with an excellent reliability, and a pressure sensor, an altimeter, an electronic apparatus, and a mobile body which have the electronic device.SOLUTION: An electronic device 1 of the present application includes: a substrate 2; a piezoresistive element 5 on the substrate 2; a wall part near one surface of the substrate 2 surrounding the piezoresistive element 5 in a planar view of the substrate 2; and a ceiling part opposite to the substrate 2 with respect to the wall part, forming a hollow part S with the substrate 2 and the wall part. An inner peripheral edge 643 at an edge of the wall part near the ceiling part has a convex corner 6432 projecting to become further from the center of the hollow part S in a planer view.SELECTED DRAWING: Figure 2 |
申请公布号 |
JP2016200534(A) |
申请公布日期 |
2016.12.01 |
申请号 |
JP20150081752 |
申请日期 |
2015.04.13 |
申请人 |
SEIKO EPSON CORP |
发明人 |
MATSUZAWA YUSUKE;FUJII MASAHIRO |
分类号 |
G01L9/00;B81B3/00;B81B7/02;H01L29/84;H03H9/24 |
主分类号 |
G01L9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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