发明名称 SYSTEM AND METHOD FOR PRODUCING PHOTOCELL DEVICE
摘要 A system and method for making photovoltaic devices of the type including a plurality of amorphous semiconductor materials (16a-c, 18a-c, 20a-c) deposited onto a continuous conductive substrate (11) provides a reflector on the surface of the substrate (11) upon which the amorphous semiconductor materials (16a-c, 18a-c, 20a-c) are deposited to improve the efficiencies thereof. The reflectors can be either specular reflectors or diffuse reflectors. The specular reflectors are formed by vapor depositing a reflective material such as gold, silver, aluminum, copper, chromium, or molybdenum onto the substrate (11). The diffuse reflectors can be formed by imparting a roughened texture to the substrate surface (13) by, for example, sandblasting the substrate surface (13) or by sputtering a first reflective material thereon. A second reflective material (15) can be vapor deposited over the diffuse reflectors prior to the deposition of the amorphous semiconductor materials (16a-c, 18a-c, 20a-c). The reflectors can be formed either immediately prior to the deposition of the amorphous semiconductor materials (16a-c, 18a-c, 20a-c) or at a remote location at which the substrate (11) is wound onto a take-up roll and thereafter transported to a plurality of deposition chambers for the later deposition of the amorphous semiconductor materials (16a-c, 18a-c, 20a-c).
申请公布号 JPS5982778(A) 申请公布日期 1984.05.12
申请号 JP19830176101 申请日期 1983.09.22
申请人 ENERGY CONVERSION DEVICES INC 发明人 MASATSUGU IZU;UORODEIMII KUZUBATEI;JIYON KAATEISU MAKUGIRU;RICHIYAADO UIRIAMU SEGIN
分类号 H01L31/04;H01L31/052;H01L31/076;H01L31/20 主分类号 H01L31/04
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