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发明名称
摘要
申请公布号
DE2660921(A1)
申请公布日期
1984.07.19
申请号
DE19762660921
申请日期
1976.11.13
申请人
发明人
分类号
C08F2/00;C08F2/48;G03C1/00;G03C5/00;G03F1/00;G03F1/02;G03F3/10;G03F5/00;G03F7/004;G03F7/09;G03F7/105;G03F7/11;G03F7/26;G03F7/40;H01L21/027
主分类号
C08F2/00
代理机构
代理人
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地址
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