| 摘要 |
PURPOSE:To quicken the film forming speed and to improve the adhering performance of film by constituting the protecting film of a thin film head mounted on a negative pressure slider by any of film coated with titanium carbide, titanium nitride or titanium carbonitride by means of the reactive ion plating method. CONSTITUTION:The thin film head 10 is formed on the surface and then the protecting film 14 (titanium carbide, titanium nitride or titanium carbonitride) is formed by the ion plating method. Then, the base is split, each is applied with taper cutting and a negative pressure slider face 21 is formed. Finally each slider is separated and then a negative pressure slider 100 mounted on a thin film head is completed. The operation of the protecting film is to avoid damages to the thin film head 10 at the cutting and grinding processes and to avoid damages to the thin film head by ion milling in the negative pressure slider forming process. |
