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发明名称
摘要
申请公布号
JPS60775(B2)
申请公布日期
1985.01.10
申请号
JP19780056006
申请日期
1978.05.11
申请人
FUJITSU LTD
发明人
YASUDA HIROSHI;OSADA TOSHIHIKO
分类号
H01L21/66;G01R31/26;G01R31/302
主分类号
H01L21/66
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