| 摘要 |
PURPOSE:To stabilize discharge as well as to reduce cost by saving a gas return capillary to be arranged on the outside of the device usually by providing center holes and gas return holes for the plural beryllia ceramic capillaries arranged between the anode and the cathode in an ion laser device, among which the gas return holes are not penetrating, but are communicated with each other through the spaces of connection of the capillaries. CONSTITUTION:A laser capillary 14 is connected between the cathode 5 having a total reflection mirror 4 and an optical window 2 at the outside end and the anode 7 similarly having an output mirror 3 and an optical window 2' at the outside end. A laser power source 10 is connected between the cathode 5 and the anode 7 to emit the laser beam 13 from the mirror 3. In this constitution, all of the plural beryllia ceramic capillaries are provided with the holes 17-19 in accordance with the optical axis, and additionally the gas return path holes 20-22 not in accordance with the optical axis are arranged in parallel to the optical axis, which are communicated with one another through the spaces 23 and 24 of the capillary. After that, the capillary is surrounded by a radiation fin 8 and is cooled down by use of a fan 9. |
