MANUFACTURE OF IRON OXIDE MAGNETIC THIN FILM

摘要

PURPOSE:To obtain a gamma-Fe2O3 thin film which is suitably used as a medium for magnetic disc having a high recording density by improving the squareness of hysteresis loop in the magnetizing direction. CONSTITUTION:On the occasion of obtaining a gamma-Fe2O3 thin film by forming an Fe2O3 thin film by heating O2-added alpha-Fe2O3 thin film manufactured by the reactive sputtering method in the flow of hydrogen and consequently heating it in the atmospheric ambient, a sample is magnetized by applying a magnetic field thereto during total process of oxidation under the atmospheric ambient or before or in the course of the oxidation under the atmospheric condition. The coercive force (Hc) and squareness of hysteresis loop of magnetic thin film thus obtained are remarkably improved. In case such thin film is used as a magnetic recording medium, recording density, regenerated output, repeatability and signal to noise ratio can also be improved.