发明名称 Heterojunction semiconductor
摘要 A heterojunction semiconductor is provided where the carrier transport dimension is governed by a layer thickness and where the characteristics of the materials self-limit process steps. A field effect transistor is provided wherein the work function is matched across regions to reduce limits on the channel dimension. A vertical transistor is provided wherein a vertical web is formed with precise thickness governed by electrolytic etching using photogenerated carrier current.
申请公布号 US4550489(A) 申请公布日期 1985.11.05
申请号 US19830557015 申请日期 1983.12.01
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 CHAPPELL, BARBARA A.;CHAPPELL, TERRY I.;WOODALL, JERRY M.
分类号 H01L21/28;H01L21/3063;H01L29/205;H01L29/267;H01L29/36;(IPC1-7):H01L29/80;H01L29/06;H01L29/161;H01L29/48 主分类号 H01L21/28
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