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经营范围
发明名称
DRY ETCHING OF METAL FILM
摘要
申请公布号
EP0023429(B1)
申请公布日期
1985.12.18
申请号
EP19800302564
申请日期
1980.07.28
申请人
FUJITSU LIMITED
发明人
TAKADA, TADAKAZU;TOKITOMO, KAZUO;HOSHINO, HITOSHI
分类号
C23F4/00;H01L21/02;H01L21/3213;(IPC1-7):H01L21/306;H01L21/31;H01L21/28;C23F1/12
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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