发明名称 CHEMICAL ETCHING APPARATUS COMBINED WITH LASER
摘要 PURPOSE:To reduce the reflection of laser light and to improve the convergence by placing a converging lens for converging laser light on a body to be worked in an etching soln. at a prescribed position without leaving a space between the lens and the etching soln. CONSTITUTION:Laser light L is converged on the surface of a body 2 to be worked in an etching soln. 3 through a converging lens 1. The underside of the lens 1 through which the laser light L passes is in contact with the etching soln. 3, and no space is left between the lens 1 and the soln. 3. The reflection and scattering of laser light L from the surface of the soln. 3 are reduced, the convergence is improved, and the absorption of energy is reduced.
申请公布号 JPS6137981(A) 申请公布日期 1986.02.22
申请号 JP19840158611 申请日期 1984.07.31
申请人 TOSHIBA CORP 发明人 MORITA NOBORU
分类号 C23F1/08;C23F1/02 主分类号 C23F1/08
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