| 摘要 |
<p>An image pick-up apparatus includes a laser light source (1) for emitting a laser beam, an acoustic-optical element (3) for deflecting the laser beam in a main-scanning direction at a horizontal scanning frequency, a vibrating mirror (8) for deflecting the laser beam deflected in the main-scanning direction in a sub-scanning direction perpendicular to the main-scanning direction at a vertical scanning frequency, and an objective lens (9) for projecting the laser beam deflected two-dimensionally onto a specimen (10) as a fine spot. A light flux reflected by the specimen (10) is collected and directed onto the vibrating mirror (8), and a linear image sensor (11) which receives the light beam reflected by the vibrating mirror (8) has a number of photoelectric converting elements aligned linearly in the main-scanning direction. The linear image sensor is read out at the horizontal scanning frequency to derive an image signal.</p> |
