| 摘要 |
<p>Optical components (16), particularly germanium components, are provided with a coating on exposed surface (15) within a vacuum chamber (17) by production of a glow discharge plasma containing carbon and another depositable element from feedstock gases which are fed to the chamber (17) via mass-glow rate controllers (9, 10, 11). The mass flow rate of the feedstock gases is maintained substantially constant at predetermined levels during respective time intervals to provide a multilayer coating of predetermined characteristics. Typically the coating has at least one first layer which is amorphous hydrogenated germanium carbide, at least one second layer which is amorphous hydrogenated germanium and at least one third layer which is amorphous hydrogenated carbon, these layers being ordered such that each second layer is bounded on each side by a first layer and the third layer is bounded on one side by a first layer, the other side of the third layer forming the exposed surface of the coating.</p> |
