发明名称 SEMICONDUCTOR MEMORY
摘要 PURPOSE:To operate at a high speed by forming a higher density P-type impurity region than a substrate in contact with an N<+> type buried layer under the N<+> type buried layer of a memory cell. CONSTITUTION:A P<+> type diffused region 18 is formed in a P<-> type substrate 1, an N<+> type buried layer 2 is formed thereon, a P<+> type base diffused region 4 is formed on an N<-> type epitaxial layer 3, and N<+> type emitter regions 5a-5c are formed in the region 4. A P-N junction capacity of the layers 2 and 18 is formed larger than that of the layer 2 and the substrate 1 to increase a junction capacity CTS between a collector and the substrate of multi-emitter transistor of a memory cell M to strengthen against information inversion due to alpha-ray. Thus, a memory having high speed and high reliability can be obtained.
申请公布号 JPS62125665(A) 申请公布日期 1987.06.06
申请号 JP19850267646 申请日期 1985.11.26
申请人 MITSUBISHI ELECTRIC CORP 发明人 ANAMI KENJI;KAYANO SHINPEI;NAKASE YASUNOBU;SHIOMI TORU
分类号 H01L21/8229;G11C11/41;H01L27/10;H01L27/102 主分类号 H01L21/8229
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