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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6333827(A)
申请公布日期
1988.02.13
申请号
JP19860178108
申请日期
1986.07.28
申请人
MITSUBISHI ELECTRIC CORP
发明人
ODA TAKESHI;MITARAI GORO
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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