Organic layer deposition apparatus and method of manufacturing organic light-emitting display device by using the same

摘要

An organic layer deposition apparatus, and a method of manufacturing an organic light-emitting display device using the organic layer deposition apparatus. The organic layer deposition apparatus includes: an electrostatic chuck that fixedly supports a substrate that is a deposition target; a deposition unit including a chamber maintained at a vacuum and an organic layer deposition assembly for depositing an organic layer on the substrate fixedly supported by the electrostatic chuck; and a first conveyer unit for moving the electrostatic chuck fixedly supporting the substrate into the deposition unit, wherein the first conveyer unit passes through inside the chamber, and the first conveyer unit includes a guide unit having a receiving member for supporting the electrostatic chuck to be movable in a direction.

主权项

1. A method of manufacturing an organic light-emitting display device, the method comprising:
supporting a substrate with an electrostatic chuck; conveying the electrostatic chuck supporting the substrate into a chamber maintained at a vacuum by using a first conveyer unit passing through the chamber, the first conveyer unit comprising a guide unit comprising a receiving member for supporting the electrostatic chuck to be movable; and depositing at least one organic layer on the substrate by using an organic layer deposition assembly disposed in the chamber while the substrate or the organic layer deposition assembly moves relative to the other, wherein the electrostatic chuck is moved by the first conveyer unit in the chamber while spaced apart from the first conveyer unit, wherein the substrate is spaced apart from the organic layer deposition assembly, and wherein the receiving member comprises:
a first receiving member extending under a portion of a lower surface of the electrostatic chuck;a second receiving member above the first receiving member and extending over a portion of an upper surface of the electrostatic chuck; anda connection member connecting the first receiving member and the second receiving member to each other such that the substrate is exposed to the organic layer deposition assembly.