发明名称 |
Electron beam metrology system |
摘要 |
Disclosed is an electron beam metrology system for measuring the width of a pattern on a specimen by scanning the specimen with a deflected electron beam, detecting a pattern image signal provided by secondary electrons emitted from the specimen, and measuring the pattern width on the specimen on the basis of the pattern detection signal. The system comprises a signal detecting device including at least one set of two detectors disposed toward the scanning direction of the electron beam in a relation symmetrical with respect to the optical axis of the electron beam for detecting pattern image signals independently of each other, a device for recognizing surface topography of the pattern using an output signal of the signal detecting device, and a device for measuring the pattern width while discriminating as to whether the pattern is a raised-profile pattern or a hollow-profile pattern.
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申请公布号 |
US4767926(A) |
申请公布日期 |
1988.08.30 |
申请号 |
US19860911791 |
申请日期 |
1986.09.26 |
申请人 |
HITACHI, LTD. |
发明人 |
MURAKOSHI, HISAYA;ICHIHASHI, MIKIO;YAMAMOTO, KENICHI |
分类号 |
G01B15/00;H01J37/28;(IPC1-7):H01J37/22 |
主分类号 |
G01B15/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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