| 发明名称 |
Magnetically coupled wafer lift pins |
| 摘要 |
An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.
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| 申请公布号 |
US4790258(A) |
申请公布日期 |
1988.12.13 |
| 申请号 |
US19870034121 |
申请日期 |
1987.04.03 |
| 申请人 |
TEGAL CORPORATION |
发明人 |
DRAGE, DAVID J.;LACHENBRUCH, ROGER B.;DRAKE, JR., HERBERT G.;PEAVEY, JERRIS H. |
| 分类号 |
H01L21/687;(IPC1-7):B05C13/00 |
主分类号 |
H01L21/687 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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