| 摘要 |
PURPOSE:To effectively cancel to reduce an intensity noise light contained in a signal light in an integrated photodetector like a DBOR by symmetrically forming pattern wirings on a substrate to equalize unnecessary components parasitic to first and second photodetector elements. CONSTITUTION:A pair of photoconductors 11, 21 are adjacently formed on the same substrate 3. The configuration of the photoconductor 11 is the same as that of the photoconductor 21 to be symmetrical, and the electrodes 11a, 11b correspond to electrodes 21a, 21b. The electrode 11a of the photoconductor 11 is connected by pattern wirings 51 to a terminal 41, and the electrode 11b is connected by pattern wirings 52 to a terminal 42. The electrode 21a of the photoconductor 21 is connected by pattern wirings 52 to the terminal 42, and the electrode 21b is connected by pattern wiring 54 to a terminal 43. The wirings 51, 52, 53, 54 are formed of a laminate (Au/Ti) of gold and titanium. A silicon nitride film is formed between the pattern wirings and the substrate 3. |
