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发明名称
APPARATUS FOR MOLECULAR BEAM SOURCE
摘要
申请公布号
JPS649887(A)
申请公布日期
1989.01.13
申请号
JP19870164429
申请日期
1987.07.01
申请人
MITSUBISHI ELECTRIC CORP
发明人
MORISHITA YOSHITAKA;MARUNO SHIGEMITSU;NOMURA YOSHITOKU;OGATA HITOSHI
分类号
C30B23/08;H01L21/203
主分类号
C30B23/08
代理机构
代理人
主权项
地址
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