| 摘要 |
The device has a non-deformable transmission arm (14) transmitting deformation of a disk shaped deformable membrane (4) to a variable capacitance type detector (6). The arm is rotatably hinged to a silicon on insulator (SOI) substrate (2) about an axis (Y) parallel to a plane of the membrane, and faces a face of the membrane opposite to a face subjected to pressure (P) such that the arm and the membrane are movably integral with each other beyond the given pressure, and the arm transmits deformation or stress from the deformation of the membrane to the detector in amplified manner. An independent claim is also included for a microelectromechanical system (MEMS) and/or nanoelectromechanical system (NEMS) assembly. |
