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发明名称
PLASMA TREATER AND DECISION METHOD OF END POINT OF PLASMA TREATMENT
摘要
申请公布号
JPS6448420(A)
申请公布日期
1989.02.22
申请号
JP19870204063
申请日期
1987.08.19
申请人
HITACHI LTD;HITACHI TECHNO ENG CO LTD
发明人
KAWASAKI YOSHINAO;KUDO KATSUYOSHI;SORAOKA MINORU;TSUBONE TSUNEHIKO;IKUHARA SHIYOUJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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