发明名称 |
Detector for charged particles |
摘要 |
A detector for charged particles includes three grid electrodes arranged approximately parallel to the surface of a specimen and separated from one another by insulating spacers, as well as a charged particle sensitive part nearly completely covering the specimen. The particle sensitive part includes a plurality of rod shaped scintillators or light conductors lying at a high potential for post acceleration of secondary particles and lying in a plane approximately parallel to the surface of the specimen.
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申请公布号 |
US4831267(A) |
申请公布日期 |
1989.05.16 |
申请号 |
US19880147338 |
申请日期 |
1988.01.22 |
申请人 |
SIEMENS AKTIENGESELLSCHAFT |
发明人 |
BRUNNER, MATTHIAS |
分类号 |
G01T1/20;G01Q30/02;G01T1/28;H01J37/244 |
主分类号 |
G01T1/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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