| 摘要 |
A spin drier comprising a rotating rotor for spin-drying semiconductor materials, in which the rotor is made of aluminum to lessen the weight of the rotor and has therein reinforcing rods fastened between the upper ring and the base plate of the rotor in order to bring higher strength of the rotor. Such arrangements enable a highly accelerated starting in rotation of the rotor. Due to such highly accelerated starting, the spin drier can remove water droplets stuck on wafers completely so as to obviate occurrence of water marks.
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